HIGHLY RELIABLE TEMPERATURE SENSOR USING RF-SPUTTERED SIC THIN-FILM

A SiC thin-film thermistor for high-temperature use has been developed by using rf-sputtered SiC thin films. This thermistor can be used for industrial and consumer use within an operating temperature range of -100 to 450°C. By using SiC thin films, the thermistor maintains high electrical stability. The resistance change is less than 3% after exposure to heat at 400°C for 2000 h. In addition, the film growth technique made possible the production of a high-accuracy thermistor, i.e., thermistor coefficient <±0.5%, thermistor resistance <±1.5%.