THE SULFURIZED INP SURFACE

被引:66
作者
WILMSEN, CW
GEIB, KM
SHIN, J
IYER, R
LILE, DL
POUCH, JJ
机构
[1] NASA,LEWIS RES CTR,CLEVELAND,OH 44135
[2] COLORADO STATE UNIV,DEPT ELECT ENGN,FT COLLINS,CO 80523
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 04期
关键词
D O I
10.1116/1.584613
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:851 / 853
页数:3
相关论文
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