共 25 条
- [22] Westwood W. D., 1976, Progress in Surface Science, V7, P71, DOI 10.1016/0079-6816(76)90002-2
- [23] WESTWOOD WD, 1974, J VAC SCI TECHNOL, V11, P381, DOI 10.1116/1.1318629
- [24] CALCULATION OF DEPOSITION RATES IN DIODE SPUTTERING SYSTEMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (01): : 1 - 9