OXIDATION OF AN ALUMINUM MAGNETRON SPUTTERING TARGET IN AR-O2 MIXTURES

被引：67

作者：

MANIV, S ^{[1
]}

WESTWOOD, WD ^{[1
]}

机构：

[1] BELL NO RES, STN C, OTTAWA K1Y 4H7, ONTARIO, CANADA

来源：

关键词：

D O I：

10.1063/1.327332

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：718 / 725

页数：8

共 25 条

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[25] SPUTTERING OF CHEMISORBED GAS (NITROGEN ON TUNGSTEN) BY LOW-ENERGY IONS
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[J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (11) : 4760 - 4766