TEMPORAL MEASUREMENTS OF PHOTOFRAGMENT ATTENUATION AT 248 NM IN THE LASER ABLATION OF POLYIMIDE IN AIR

被引：41

作者：

KOREN, G ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 16期

关键词：

D O I：

10.1063/1.97960

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1030 / 1032

页数：3

共 11 条

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DYER, PE ;

SRINIVASAN, R .

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[5]

HO F, 1986, CLEO C LASERS ELECTR, P88

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KOREN, G ;

YEH, JTC .

JOURNAL OF APPLIED PHYSICS, 1984, 56 (07) :2120-2126

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KOREN, G ;

YEH, JTC .

APPLIED PHYSICS LETTERS, 1984, 44 (12) :1112-1114

[8] CO2-LASER ASSISTED UV ABLATIVE PHOTOETCHING OF KAPTON FILMS [J].

KOREN, G .

APPLIED PHYSICS LETTERS, 1984, 45 (01) :10-12

[9] PHOTOCHEMICAL CLEAVAGE OF A POLYMERIC SOLID - DETAILS OF THE ULTRAVIOLET-LASER ABLATION OF POLY(METHYL METHACRYLATE) AT 193-NM AND 248-NM [J].

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BRAREN, B ;

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MACROMOLECULES, 1986, 19 (03) :916-921

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