MEASUREMENT OF DEEP LEVELS USING C-V TECHNIQUES

被引：5

作者：

LAMBERT, LM

KUMP, HJ

机构：

[1] IBM CORP, SYST PROD DIV, Essex Jct, VT USA

[2] UNIV VERMONT, BURLINGTON, VT USA

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1974年 / 21卷 / 01期

关键词：

D O I：

10.1002/pssa.2210210125

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：235 / 245

页数：11

共 29 条

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