TEMPERATURE-DEPENDENCE OF ION-BEAM MIXING IN GAAS, ALAS, AND GAAS/ALAS/GAAS

被引：12

作者：

KLATT, JL ^{[1
]}

AVERBACK, RS ^{[1
]}

FORBES, DV ^{[1
]}

COLEMAN, JJ ^{[1
]}

机构：

[1] UNIV ILLINOIS,MICROELECTR LAB,MAT RES LAB,URBANA,IL 61801

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 07期

关键词：

D O I：

10.1063/1.109863

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Ion beam mixing of AlAs markers in GaAs and GaAs markers in AlAs has been measured as a function of irradiation temperature with 1 MeV Kr ions. The mixing parameter in the GaAs matrix was almost-equal-to 140 angstrom5/eV at temperatures between 110 and 473 K, but dropped to almost-equal-to 120 angstrom5/eV at 573 K. The value was smaller in the AlAs matrix, almost-equal-to 90 angstrom5/eV between 110 and 473 K, but it increased to almost-equal-to 120 angstrom5/eV between 473 and 625 K. Ion beam mixing in a trilayer sample, GaAs/AlAs/GaAs, was also measured for comparison. At the deeper interface, AlAs on GaAs, and low temperature, the mixing parameter was 440 angstrom5/eV, but only 250 angstrom5/eV at the other interface, GaAs on AlAs. Mixing at the lower inter-face decreased at 573 K to 160 angstrom5/eV while it decreased at 473 K at the other interface to 110 angstrom5/eV. These results are interpreted on the basis of the influence of crystal structure on ion beam mixing.

引用

页码：976 / 978

页数：3

共 17 条

[1] COMPOSITIONAL DISORDERING OF GAAS/ALGAAS MULTIPLE QUANTUM WELLS USING ION-BOMBARDMENT AT ELEVATED-TEMPERATURES [J].

ANDERSON, KK ;

DONNELLY, JP ;

WANG, CA ;

WOODHOUSE, JD ;

HAUS, HA .

APPLIED PHYSICS LETTERS, 1988, 53 (17) :1632-1634

[2] INTERACTIONS OF ENERGETIC PARTICLES AND CLUSTERS WITH SOLIDS [J].

AVERBACK, RS ;

DELARUBIA, TD ;

HSIEH, HM ;

BENEDEK, R .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 :709-717

[3] A MONTE-CARLO COMPUTER-PROGRAM FOR THE TRANSPORT OF ENERGETIC IONS IN AMORPHOUS TARGETS [J].

BIERSACK, JP ;

HAGGMARK, LG .

NUCLEAR INSTRUMENTS & METHODS, 1980, 174 (1-2) :257-269

[4] INTERACTION OF ENERGETIC IONS WITH INHOMOGENEOUS SOLIDS [J].

BODE, M ;

OURMAZD, A ;

CUNNINGHAM, J ;

HONG, M .

PHYSICAL REVIEW LETTERS, 1991, 67 (07) :843-846

[5] TEMPERATURE-DEPENDENCE OF COMPOSITIONAL DISORDERING OF GAAS-ALAS SUPERLATTICES DURING MEV KR IRRADIATION [J].

BRYAN, RP ;

MILLER, LM ;

COCKERILL, TM ;

COLEMAN, JJ ;

KLATT, JL ;

AVERBACK, RS .

PHYSICAL REVIEW B, 1990, 41 (06) :3889-3892

[6] MATERIAL-DEPENDENT AMORPHIZATION AND EPITAXIAL CRYSTALLIZATION IN ION-IMPLANTED ALAS/GAAS LAYER STRUCTURES [J].

CULLIS, AG ;

CHEW, NG ;

WHITEHOUSE, CR ;

JACOBSON, DC ;

POATE, JM ;

PEARTON, SJ .

APPLIED PHYSICS LETTERS, 1989, 55 (12) :1211-1213

[7] A SEMIAUTOMATIC ALGORITHM FOR RUTHERFORD BACKSCATTERING ANALYSIS [J].

DOOLITTLE, LR .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) :227-231

[8]

JENCIC I, 1991, J APPL PHYS, V69, P1287, DOI 10.1063/1.347262

[9] WHEN IS THERMODYNAMICS RELEVANT TO ION-INDUCED ATOMIC REARRANGEMENTS IN METALS [J].

JOHNSON, WL ;

CHENG, YT ;

VANROSSUM, M ;

NICOLET, MA .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :657-665

[10] LOW-TEMPERATURE ION-BEAM MIXING IN METALS [J].

KIM, SJ ;

NICOLET, MA ;

AVERBACK, RS ;

PEAK, D .

PHYSICAL REVIEW B, 1988, 37 (01) :38-49

← 1 2 →