STABILITY OF NITROGEN-RICH TITANIUM NITRIDE AND ZIRCONIUM NITRIDE FILMS

被引：24

作者：

SALMENOJA, K ^{[1
]}

KORHONEN, AS ^{[1
]}

EROLA, E ^{[1
]}

MOLARIUS, JM ^{[1
]}

机构：

[1] HELSINKI UNIV TECHNOL,DEPT MIN & MET,MET WORKING & HEAT TREATMENT LAB,SF-02150 ESPOO,FINLAND

来源：

APPLIED PHYSICS LETTERS | 1986年 / 49卷 / 09期

关键词：

D O I：

10.1063/1.97131

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：505 / 506

页数：2

共 17 条

[1] NITROGEN IMPLANTATION OF METALS [J].

ANTTILA, A ;

KEINONEN, J ;

UHRMACHER, M ;

VAHVASELKA, S .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) :1423-1425

[2] DIFFUSION OF NITROGEN IN ALPHA-TI [J].

ANTTILA, A ;

RAISANEN, J ;

KEINONEN, J .

APPLIED PHYSICS LETTERS, 1983, 42 (06) :498-500

[3]

ASPLUND M, 1985, MATERIALS RES SOC S, V54, P541

[4] TIN COATINGS ON STEEL [J].

BUHL, R ;

PULKER, HK ;

MOLL, E .

THIN SOLID FILMS, 1981, 80 (1-3) :265-270

[5] CONTACT RESISTANCE BEHAVIOR OF TITANIUM NITRIDE [J].

ERNSBERGER, C ;

NICKERSON, J ;

MILLER, A ;

BANKS, D .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2303-2307

[6] TIN FILMS PREPARED BY NITROGEN IMPLANTATION ON TI-COATED FUSED SIO2 [J].

EROLA, M ;

KEINONEN, J ;

ANTTILA, A ;

KOSKINEN, J .

SOLAR ENERGY MATERIALS, 1985, 12 (05) :353-359

[7] INFLUENCE OF THE NITROGEN PARTIAL-PRESSURE ON THE PROPERTIES OF DC-SPUTTERED TITANIUM AND TITANIUM NITRIDE FILMS [J].

LEMPERIERE, G ;

POITEVIN, JM .

THIN SOLID FILMS, 1984, 111 (04) :339-349

[8] STABLE METALLIZATION SYSTEMS FOR SOLAR-CELLS [J].

MAENPAA, M ;

SUNI, I ;

SIGURD, D ;

FINETTI, M ;

NICOLET, MA .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1982, 72 (02) :763-769

[9] TI-N PHASES FORMED BY REACTIVE ION PLATING [J].

MOLARIUS, JM ;

KORHONEN, AS ;

RISTOLAINEN, EO .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2419-2425

[10] A HIGH-RATE SPUTTERING PROCESS FOR THE FORMATION OF HARD FRICTION-REDUCING TIN COATINGS ON TOOLS [J].

MUNZ, WD ;

HOFMANN, D ;

HARTIG, K .

THIN SOLID FILMS, 1982, 96 (01) :79-86

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