MICROFOCUSED ION-BEAM APPLICATIONS IN MICROELECTRONICS

被引：24

作者：

HARRIOTT, LR

机构：

来源：

关键词：

D O I：

10.1016/0169-4332(89)90939-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：432 / 442

页数：11

共 32 条

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SMITH, DEA
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