RESIST HEATING EFFECT IN DIRECT ELECTRON-BEAM WRITING

被引:38
作者
ABE, T
OHTA, K
WADA, H
TAKIGAWA, T
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 03期
关键词
D O I
10.1116/1.584309
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:853 / 857
页数:5
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