INTEGRATED E AND DE/DX SEMICONDUCTOR PARTICLE DETECTORS MADE BY ION IMPLANTATION

被引：8

作者：

MARTIN, FW

机构：

[1] Ion Physics Corporation, Burlington

来源：

NUCLEAR INSTRUMENTS & METHODS | 1969年 / 72卷 / 02期

关键词：

D O I：

10.1016/0029-554X(69)90163-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：223 / +

页数：1

共 10 条

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[7]

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