QUANTITATIVE-EVALUATION OF SUBSTRATE-TEMPERATURE DEPENDENCE OF GE INCORPORATION IN GAAS DURING MOLECULAR-BEAM EPITAXY

被引:31
作者
KUNZEL, H
FISCHER, A
PLOOG, K
机构
来源
APPLIED PHYSICS | 1980年 / 22卷 / 01期
关键词
D O I
10.1007/BF00897927
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:23 / 30
页数:8
相关论文
共 21 条
[1]   VAPOR PRESSURES AND PHASE EQUILIBRIA IN GA-AS SYSTEM [J].
ARTHUR, JR .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1967, 28 (11) :2257-&
[2]   INCORPORATION AND CHARACTERIZATION OF ACCEPTORS IN EPITAXIAL GAAS [J].
ASHEN, DJ ;
DEAN, PJ ;
HURLE, DTJ ;
MULLIN, JB ;
WHITE, AM .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1975, 36 (10) :1041-1053
[3]  
Cho A. Y., 1975, Progress in Solid State Chemistry, V10, P157, DOI 10.1016/0079-6786(75)90005-9
[4]   IMPURITY PROFILES OF GAAS EPITAXIAL LAYERS DOPED WITH SN, SI, AND GE GROWN WITH MOLECULAR-BEAM EPITAXY [J].
CHO, AY .
JOURNAL OF APPLIED PHYSICS, 1975, 46 (04) :1733-1735
[5]   BONDING DIRECTION AND SURFACE-STRUCTURE ORIENTATION ON GAAS (001) [J].
CHO, AY .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (07) :2841-2843
[6]   P-N JUNCTION FORMATION DURING MOLECULAR-BEAM EPITAXY OF GE-DOPED GAAS [J].
CHO, AY ;
HAYASHI, I .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (11) :4422-&
[7]   INTERFACE AND DOPING PROFILE CHARACTERISTICS WITH MOLECULAR-BEAM EPITAXY OF GAAS - GAAS VOLTAGE VARACTOR [J].
CHO, AY ;
REINHART, FK .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (04) :1812-1817
[8]   EVAPORATION OF GAAS UNDER EQUILIBRIUM AND NONEQUILIBRIUM CONDITIONS USING A MODULATED BEAM TECHNIQUE [J].
FOXON, CT ;
HARVEY, JA ;
JOYCE, BA .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1973, 34 (10) :1693-&
[9]  
MURATANI T, 1978, J CRYST GROWTH, V45, P302
[10]   SELF-MASKING SELECTIVE EPITAXY BY MOLECULAR-BEAM METHOD [J].
NAGATA, S ;
TANAKA, T .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (03) :940-942