QUANTITATIVE INSITU CHARACTERIZATION OF X-RAY MASK DISTORTIONS

被引：5

作者：

WELLS, GM ^{[1
]}

CHEN, G ^{[1
]}

SO, D ^{[1
]}

BRODSKY, EL ^{[1
]}

KRIESEL, K ^{[1
]}

CERRINA, F ^{[1
]}

KARNEZOS, M ^{[1
]}

机构：

[1] HEWLETT PACKARD LABS,PALO ALTO,CA 94304

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期

关键词：

D O I：

10.1116/1.584080

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2190 / 2195

页数：6

共 11 条

[1] CHEN GF, IN PRESS
[2] HEATING AND TEMPERATURE-INDUCED DISTORTIONS OF SILICON X-RAY MASKS
HEINRICH, K
BETZ, H
HEUBERGER, A
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1352 - 1357
[3] TUNGSTEN - AN ALTERNATIVE TO GOLD FOR X-RAY MASKS
KARNEZOS, M
RUBY, R
HEFLINGER, B
NAKANO, H
JONES, R
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 283 - 287
[4] LONGHURST RS, 1981, GEOMETRICAL PHYSICAL, P171
[5] LONGHURST RS, 1981, GEOMETRICAL PHYSICAL, P156
[6] ROARK RJ, 1975, FORMULAS STRESS STRA, P168
[7] THE USE OF DIFFRACTION TECHNIQUES FOR THE STUDY OF INPLANE DISTORTIONS OF X-RAY MASKS
RUBY, R
BALDWIN, D
KARNEZOS, M
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 272 - 277
[8] THE MOIRE METHOD - A REVIEW
SCIAMMARELLA, CA
[J]. EXPERIMENTAL MECHANICS, 1982, 22 (11) : 418 - 433
[9] THE DEVELOPMENT OF A SILICON-NITRIDE MASK TECHNOLOGY FOR SYNCHROTRON RADIATION X-RAY-LITHOGRAPHY
VISSER, CCG
UGLOW, JE
BURNS, DW
WELLS, G
REDAELLI, R
CERRINA, F
GUCKEL, H
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1988, 266 (1-3) : 686 - 690
[10] X-RAY-LITHOGRAPHY BEAMLINES AT ALADDIN
WELLS, GM
LAI, B
SO, D
REDAELLI, R
CERRINA, F
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1988, 266 (1-3) : 278 - 286