X-RAY-LITHOGRAPHY BEAMLINES AT ALADDIN

被引：20

作者：

WELLS, GM ^{[1
]}

LAI, B ^{[1
]}

SO, D ^{[1
]}

REDAELLI, R ^{[1
]}

CERRINA, F ^{[1
]}

机构：

[1] UNIV WISCONSIN,WISCONSIN CTR X-RAY LITHOG,MADISON,WI 53706

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1988年 / 266卷 / 1-3期

关键词：

D O I：

10.1016/0168-9002(88)90397-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：278 / 286

页数：9

共 13 条

[1]

BORN, 1980, PRINCIPLE OPTICS, P370

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Taylor, J.W. .

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[3]

CERRINA F, UNPUB

[4] HEATING AND TEMPERATURE-INDUCED DISTORTIONS OF SILICON X-RAY MASKS [J].

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[5] TUNGSTEN - AN ALTERNATIVE TO GOLD FOR X-RAY MASKS [J].

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JONES, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01) :283-287

[6] THE UNIVERSITY-OF-WISCONSIN X-RAY-LITHOGRAPHY BEAMLINE - 1ST RESULTS [J].

LAI, B ;

MITCHELL, G ;

WELLS, GM ;

CERRINA, F .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1986, 246 (1-3) :681-686

[7] SYNCHROTRON-BASED X-RAY-LITHOGRAPHY AT STANFORD-UNIVERSITY [J].

PAN, L ;

KING, PL ;

PIANETTA, P ;

SELIGSON, D ;

BARBEE, TW .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1988, 266 (1-3) :287-292

[8] THE USE OF DIFFRACTION TECHNIQUES FOR THE STUDY OF INPLANE DISTORTIONS OF X-RAY MASKS [J].

RUBY, R ;

BALDWIN, D ;

KARNEZOS, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01) :272-277

[9]

SO D, 1987, SPIE P, V773

[10]

TAYLOR G, 1987, SOLID STATE TECHNO B, V5, P105

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