INCUBATION PROCESS IN POLYIMID UPON UV PHOTOABLATION

被引：7

作者：

HESZLER, P

BOR, Z

HAJOS, G

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1989年 / 49卷 / 06期

关键词：

D O I：

10.1007/BF00617002

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：739 / 740

页数：2

共 12 条

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