SELF-DEVELOPMENT MECHANISM OF NITROCELLULOSE - HEATING EFFECT

被引：3

作者：

KANEKO, H ^{[1
]}

YASUOKA, Y ^{[1
]}

GAMO, K ^{[1
]}

NAMBA, S ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期

关键词：

D O I：

10.1116/1.584456

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1778 / 1781

页数：4

共 13 条

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[5] SELF-DEVELOPMENT PROPERTIES OF NITROCELLULOSE (DEPENDENCE ON ION ENERGIES) [J].

KANEKO, H ;

YASUOKA, Y ;

GAMO, K ;

NAMBA, S .

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[6] NITROCELLULOSE AS A SELF-DEVELOPING RESIST FOR FOCUSED ION-BEAM LITHOGRAPHY [J].

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[7] PROGRESS IN SELF-DEVELOPING METAL FLUORIDE RESISTS [J].

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