共 11 条
[1]
THE RANGE OF LIGHT-IONS IN POLYMERIC RESISTS
[J].
JOURNAL OF APPLIED PHYSICS,
1984, 56 (06)
:1801-1807
[2]
LONG-LIFETIME, RELIABLE LIQUID-METAL ION SOURCES FOR BORON, ARSENIC, AND PHOSPHORUS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1987, 5 (01)
:197-202
[3]
NITROCELLULOSE AS A SELF-DEVELOPING RESIST WITH SUBMICROMETER RESOLUTION AND PROCESSING STABILITY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1983, 1 (04)
:1178-1181
[5]
FOCUSED ION-BEAM ETCHING OF RESIST MATERIALS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1986, 4 (01)
:355-357
[6]
DEVELOPMENT OF BORON LIQUID-METAL ION-SOURCE FOR FOCUSED ION-BEAM SYSTEM
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1987, 5 (01)
:190-194
[7]
NITROCELLULOSE AS A SELF-DEVELOPING RESIST FOR FOCUSED ION-BEAM LITHOGRAPHY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1988, 6 (03)
:982-985
[9]
LINDHARD J, 1968, K DAN VIDENSK SELSK, V36
[10]
ION-BEAM SENSITIVITY OF POLYMER RESISTS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1981, 19 (04)
:1358-1362