CHANNELING TRANSMISSION OF PROTONS THROUGH THIN SILICON MEMBRANES

被引：5

作者：

PARMA, EJ ^{[1
]}

HART, RR ^{[1
]}

BARTELT, JL ^{[1
]}

机构：

[1] HUGHES RES LABS, MALIBU, CA 90265 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.583871

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：228 / 231

页数：4

共 12 条

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[10] CONTROLLED ETCHING OF SILICON IN CATALYZED ETHYLENEDIAMINE-PYROCATECHOL-WATER SOLUTIONS
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