Nonuniform segregation of Ga at AlAs/GaAs heterointerfaces

被引:60
作者
Braun, W
Trampert, A
Daweritz, L
Ploog, KH
机构
[1] Paul-Drude-Institut für Festkörperelektronik, D-10117 Berlin
来源
PHYSICAL REVIEW B | 1997年 / 55卷 / 03期
关键词
D O I
10.1103/PhysRevB.55.1689
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Segregation at GaAs/AlAs (001) heterointerfaces has been studied experimentally by an in situ electron diffraction technique during molecular-beam epitaxy and by ex situ transmission electron microscopy. Whereas the GaAs-on-AlAs interface is abrupt, we find Ga segregating up to 20 crystal planes when depositing AlAs on GaAs(001). The measurements indicate an anisotropic in-plane structure of this interface with elongated AlxGa1-xAs regions extending along [<(110) over bar>]. Our findings provide insight into both the segregation mechanism and electron diffraction from growing surfaces at glancing angles.
引用
收藏
页码:1689 / 1695
页数:7
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