共 28 条
[2]
*AM PIEZ CER, 1991, PIEZ CER PROP APPL P
[5]
BROWN SB, 1996, RELIABILITY LONG TER
[6]
CAO L, 2000, DESIGN SIMULATION FA
[7]
NORMALLY CLOSED MICROVALVE AND MICROPUMP FABRICATED ON A SILICON-WAFER
[J].
SENSORS AND ACTUATORS,
1989, 20 (1-2)
:163-169
[8]
FOLTA JA, 1992, P WORKSH IEEE SOL ST
[10]
GRAVESEN P, 1993, J MICROMECH MICROENG, V4, P157