Production of Silicon from SiH4 in a Fluidized Bed, Operation and Results

被引：14

作者：

Filtvedt, Werner O. ^{[1
]}

Mongstad, Trygve ^{[1
]}

Holt, Arve ^{[1
]}

Melaaen, Morten ^{[2
]}

Klette, Hallgeir ^{[1
]}

机构：

[1] Inst Energy Technol, Solar Inst 18, N-2027 Kjeller, Norway

[2] Telemark Univ Coll, Porsgrunn, Norway

来源：

INTERNATIONAL JOURNAL OF CHEMICAL REACTOR ENGINEERING | 2013年 / 11卷

关键词：

silicon; silane; fluidized bed; THERMAL-DECOMPOSITION; CRYSTALLINE SILICON; MONOSILANE; NUCLEATION; SILANE;

D O I：

10.1515/ijcre-2012-0027

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

For an installed silicon-based solar cell panel, about 40% of the energy needed for fabrication is consumed for production of the silicon feedstock. Reducing the energy consumption in this step is therefore crucial in order to minimize the energy payback time and cost of the technology. The most promising alternative to the conventional methods is to use fluidized bed reactors. In this article, we report the results from a novel reactor layout with a selectively cooled distribution arrangement. Important aspects of fludized bed monitoring and operation are described. Two different operation regimes are stated yielding hence porous and dense growth. Further, the method of encapsulating fines by means of more dense depositions is verified, and the nature of the scavenged material is characterized. Also, two different types of fines formation are identified and accounted for.

引用

页码：57 / 68

页数：12

共 22 条

[1] MASS-SPECTRA OF SILICON CONTAINING INDUSTRIAL GASES [J].

BAN, VS .

MATERIALS RESEARCH BULLETIN, 1975, 10 (02) :81-83

[2]

Bernreuter J., 2012, Silicon Chem Solar Ind, V11, P281

[3] NUCLEATION OF CVD SILICON ON SIO2 AND SI3N4 SUBSTRATES .1. SIH4-HCL-H2 SYSTEM AT HIGH-TEMPERATURES [J].

CLAASSEN, WAP ;

BLOEM, J .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (01) :194-202

[4] Microstructure and grain growth of polycrystalline silicon grown in fluidized bed reactors [J].

Dahl, M. M. ;

Bellou, A. ;

Bahr, D. F. ;

Norton, M. G. ;

Osborne, E. W. .

JOURNAL OF CRYSTAL GROWTH, 2009, 311 (06) :1496-1500

[5] Chemical vapor deposition of silicon from silane: Review of growth mechanisms and modeling/scaleup of fluidized bed reactors [J].

Filtvedt, W. O. ;

Holt, A. ;

Ramachandran, P. A. ;

Melaaen, M. C. .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2012, 107 :188-200

[6] Development of fluidized bed reactors for silicon production [J].

Filtvedt, W. O. ;

Javidi, M. ;

Holt, A. ;

Melaaen, M. C. ;

Marstein, E. ;

Tathgar, H. ;

Ramachandran, P. A. .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2010, 94 (12) :1980-1995

[7]

Filtvedt WO, 2011, INT J CHEM REACT ENG, V9

[8] THE HOMOGENEOUS NUCLEATION OF CONDENSED SILICON IN THE GASEOUS SI-H-CL SYSTEM [J].

HERRICK, CS ;

WOODRUFF, DW .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (10) :2417-2422

[9] SILICON PARTICLE GROWTH IN A FLUIDIZED-BED REACTOR [J].

HSU, G ;

ROHATGI, N ;

HOUSEMAN, J .

AICHE JOURNAL, 1987, 33 (05) :784-791

[10] The Industrial Research about China Solar PV Based on the Price of Polysilicon [J].

Liu, Yijun ;

Liu, Yingqi .

MANUFACTURING SCIENCE AND TECHNOLOGY, PTS 1-8, 2012, 383-390 :7043-7048

← 1 2 3 →