Lateral-junction vertical-cavity surface-emitting laser grown by molecular-beam epitaxy on a GaAs (311) A-oriented substrate

被引:23
作者
Vaccaro, PO [1 ]
Ohnishi, H [1 ]
Fujita, K [1 ]
机构
[1] ATR, Adapt Commun Res Labs, Kyoto 6190288, Japan
关键词
D O I
10.1063/1.124202
中图分类号
O59 [应用物理学];
学科分类号
摘要
A vertical-cavity surface-emitting laser was fabricated using a lateral p-n junction to inject carriers in the InGaAs active layer. The lateral p-n junction is formed in GaAs epilayers doped only with silicon and grown by molecular-beam epitaxy on a patterned GaAs (311) A-oriented substrate. This design allows the use of electrically insulating distributed Bragg reflectors and coplanar contacts while simplifying device process. Pulsed-mode operation at room temperature was obtained with a threshold current of 2.3 mA. Light emission spectrum has a single peak at 942 nm with a full width at half maximum of 0.15 nm. (C) 1999 American Institute of Physics. [S0003-6951(99)04625-2].
引用
收藏
页码:3854 / 3856
页数:3
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