Effect of critical thickness on structural and optical properties of InxGa1-xN/GaN multiple quantum wells

被引:26
作者
Lü, W
Li, DB
Li, CR
Shen, F
Zhang, Z
机构
[1] Chinese Acad Sci, Inst Phys, Beijing Lab Electron Microscopy, Beijing 100080, Peoples R China
[2] Chinese Acad Sci, Ctr Condensed Matter Phys, Beijing 100080, Peoples R China
[3] Jilin Univ, Coll Mat Sci & Engn, Changchun 130023, Peoples R China
[4] Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100080, Peoples R China
[5] Beijing Univ Technol, Beijing 100022, Peoples R China
关键词
D O I
10.1063/1.1667010
中图分类号
O59 [应用物理学];
学科分类号
摘要
InGaN/GaN multiquantum-well (MQW) structures grown by metalorganic chemical-vapor deposition on n-type GaN and capped by p-type GaN were investigated by cross-sectional transmission electron microscopy, double crystal x-ray diffraction, and temperature-dependent photoluminescence. For the sample with strained-layer thicknesses greater than the critical thicknesses, a high density of pure edge type threading dislocations generated from MQW layers and extended to the cap layer was observed. These dislocations result from a relaxation of the strained layers when their thicknesses are beyond the critical thicknesses. Because of indium outdiffusion from the well layers due to the anneal effect of Mg-doped cap layer growth and defects generated from strain relaxation, the PL emission peak was almost depressed by the broad yellow band with an intensity maximum at 2.28 eV. But for the sample with strained-layer thicknesses less than the critical thicknesses, it has no such phenomenon. The measured critical thicknesses are consistent with the calculated values using the model proposed by Fischer, Kuhne, and Richter. (C) 2004 American Institute of Physics.
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收藏
页码:4362 / 4366
页数:5
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