Determination of the critical layer thickness in the InGaN/GaN heterostructures

被引:108
作者
Parker, CA [1 ]
Roberts, JC
Bedair, SM
Reed, MJ
Liu, SX
El-Masry, NA
机构
[1] N Carolina State Univ, Dept Elect & Comp Engn, Raleigh, NC 27695 USA
[2] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
关键词
D O I
10.1063/1.125146
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present an approach to determine the critical layer thickness in the InxGa1-xN/GaN heterostructure based on the observed change in the photoluminescence emission as the InxGa1-xN film thickness increases. From the photoluminescence data, we identify the critical layer thickness as the thickness where a transition occurs from the strained to unstrained condition, which is accompanied by the appearance of deep level emission and a drop in band edge photoluminescence intensity. The optical data that indicate the onset of critical layer thickness, was also confirmed by the changes in InxGa1-xN surface morphology with thickness, and is consistent with x-ray diffraction measurements. (C) 1999 American Institute of Physics. [S0003-6951(99)01443-6].
引用
收藏
页码:2776 / 2778
页数:3
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