Scaling MOSFETs to the Limit: A Physicists's Perspective

被引:24
作者
Fischetti, M. V. [1 ]
机构
[1] IBM Corp, Thomas J Watson Res Ctr, SRDC, IBM Res Div, Yorktown Hts, NY 10598 USA
关键词
scaling; Coulomb interactions; high-kappa insulators; strained Si; surface roughness;
D O I
10.1023/B:JCEL.0000011402.54036.32
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
To circumvent its present practical limits-mainly gate leakage and poor performance-'MOSFET scaling' has taken a different meaning: Not simply shrinking the device, but changing its nature. Here it is suggested that long-range Coulomb interactions constitute a possible fundamental cause of the poor performance of sub-50 nm devices. Alternative device-designs and materials are briefly discussed from a transport-physics perpsective: High-kappa insulators, transport in thin Si body (SOI and double-gate), along different crystal directions and on different materials. The major role played by the interfaces (surface plasmons and phonons, roughness, confinement) emerges as one of the most important common elements.
引用
收藏
页码:73 / 79
页数:7
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