Characterization of lead-zirconate-titanate (PZT) films formed by photo-decomposition of metal organic polymer

被引：16

作者：

Zhang, JY ^{[1
]}

Boyd, IW ^{[1
]}

机构：

[1] Univ London Univ Coll, London WC1E 7JE, England

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1999年 / 38卷 / 4A期

关键词：

photo-assisted sol-gel process; PZT films; excimer lamp; MOS devices; thin film;

D O I：

10.1143/JJAP.38.L393

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The characteristics of lead-zirconate-titanate (PZT) films formed by photo-assisted decomposition of metal organic sol-gel polymer at low temperatures using a 172 nm excimer lamp is reported. The thickness of the films formed on Si was determined using ellipsometry while their composition was determined by electron probe X-ray microanalysis. Current-voltage measurements showed that the leakage current densities in the PZT films were over an order of magnitude less than those obtained in films prepared by conventional thermal processing.

引用

页码：L393 / L394

页数：2

共 9 条

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