共 51 条
[22]
DEPENDENCE OF ELECTRICAL-CONDUCTIVITY OF NANOCRYSTALLINE SILICON ON STRUCTURAL-PROPERTIES AND THE EFFECT OF SUBSTRATE BIAS
[J].
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES,
1987, 55 (03)
:377-389
[23]
LANNIN JS, 1984, SEMICONDUCTORS SEM B, V21
[27]
FORMATION OF POLYSILICON FILMS BY CATALYTIC CHEMICAL VAPOR-DEPOSITION (CAT-CVD) METHOD
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS,
1991, 30 (8B)
:L1522-L1524
[29]
CATALYTIC CHEMICAL VAPOR-DEPOSITION (CTL-CVD) METHOD PRODUCING HIGH-QUALITY HYDROGENATED AMORPHOUS-SILICON
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS,
1986, 25 (12)
:L949-L951
[30]
Photoconductive polycrystalline silicon films on glass obtained by hot-wire CVD
[J].
AMORPHOUS SILICON TECHNOLOGY - 1996,
1996, 420
:289-294