Fast single-step fabrication of nanopores

被引：12

作者：

Chen, P. ^{[1
]}

Wu, M-Y ^{[1
]}

Salemink, H. W. M. ^{[1
]}

Alkemade, P. F. A. ^{[1
]}

机构：

[1] Delft Univ Technol, Kavli Inst Nanosci, NL-2628 CJ Delft, Netherlands

来源：

NANOTECHNOLOGY | 2009年 / 20卷 / 01期

关键词：

BEAM-INDUCED DEPOSITION; FOCUSED ION; MEMBRANES; FUNCTIONALIZATION; TRANSPORT;

D O I：

10.1088/0957-4484/20/1/015302

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We report a new method for the fabrication of sub-10 nm nanopores in a fast single process step. The pore formation is accomplished by exploiting the competition between sputtering and deposition in ion-beam-induced deposition (IBID) on a thin membrane. The pore diameter can be controlled by adjusting the ion beam and gas exposure conditions. The pore diameter is well below the limit that can be achieved by focused ion beam (FIB) milling alone. There is no need of preparation and successive treatments. Apart from simplicity and speed, this method offers an additional advantage of a broad choice of material and thickness of the deposit and the membrane.

引用

页数：6

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