Layer by layer growth of BaTiO3 thin films with extremely smooth surfaces by laser molecular beam epitaxy

被引：7

作者：

Wang, HS ^{[1
]}

Ma, K ^{[1
]}

Cui, DF ^{[1
]}

Peng, ZQ ^{[1
]}

Zhou, YL ^{[1
]}

Lu, HB ^{[1
]}

Chen, ZH ^{[1
]}

Li, L ^{[1
]}

Yang, GZ ^{[1
]}

机构：

[1] CHINESE ACAD SCI,INST PHYS,NATL LAB SUPERCONDUCT,BEIJING 100080,PEOPLES R CHINA

来源：

JOURNAL OF CRYSTAL GROWTH | 1997年 / 177卷 / 1-2期

关键词：

laser molecular beam epitaxy; ferroelectric thin film; structure; layer by layer growth; OPTICAL-PROPERTIES; DEPOSITION; ABLATION; MGO(100);

D O I：

10.1016/S0022-0248(96)00788-9

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Using pure ozone-assisted laser molecular beam epitaxy, we have grown c-axis-oriented single crystal BaTiO3 thin films on SrTiO3 substrates at temperatures (T-s) of 400-750 degrees C and under ambient gas pressures of 5 x 10(-5) to 1 x 10(-1) Pa, respectively. Stripy reflection high-energy electron diffraction (RHEED) patterns and regular RHEED intensity oscillations reveal the smooth surface and layer-by-layer epitaxial growth of the films. Scanning electron microscopy analysis shows that the films are free of pinholes, grain boundaries and outgrowths on the surface. In addition, we found a strong dependence of the film lattice constant c on T-s, which might be related to the strain in the film.

引用

页码：67 / 73

页数：7

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