Physics and modeling of Ge-on-Insulator MOSFETs

被引:11
作者
Chin, A [1 ]
Kao, HL [1 ]
Tseng, YY [1 ]
Yu, DS [1 ]
Chen, CC [1 ]
McAlister, SP [1 ]
Chi, CC [1 ]
机构
[1] Univ Syst Taiwan, NCTU, Dept Elect Engn, NanoSci Tech Ctr, Hsinchu, Taiwan
来源
PROCEEDINGS OF ESSDERC 2005: 35TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE | 2005年
关键词
D O I
10.1109/ESSDER.2005.1546641
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have used process and device simulation tools (T-Supreme and Medici) to analyze the measured DC characteristics of Ge-on-Insulator (GOI) MOSFETs. The GOI devices have higher drive current than do their Si counterparts, due to the smaller effective mass (m) and smaller Ge energy bandgap - however this also causes a larger off-state I-ds leakage current. The simulations predict that the GOI MOSFETs have better RF gain and noise performance compared with Si devices. This is important for high speed operation as down-scaling continues.
引用
收藏
页码:285 / 288
页数:4
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