Step structure and ordering in Zn-doped GaInP

被引:13
作者
Lee, SH [1 ]
Fetzer, CM
Stringfellow, GB
Choi, CJ
Seong, TY
机构
[1] Univ Utah, Dept Mat Sci & Engn, Salt Lake City, UT 84112 USA
[2] Kwanju Inst Sci & Technol, Dept Mat Sci & Engn, Kwangju 506712, South Korea
关键词
D O I
10.1063/1.370997
中图分类号
O59 [应用物理学];
学科分类号
摘要
GaInP grown on (001) substrates by organometallic vapor phase epitaxy is typically highly ordered. The driving force is due to the [(1) over bar 10] oriented P dimers on the surface. There are apparently additional kinetic factors related to surface steps that also play a key role in the ordering mechanism. However, the mechanism remains undetermined. This work presents the effects of Zn on the step structure and ordering during epitaxial growth. The degree of order is estimated from the low temperature photoluminescence peak energy to be approximately 0.5 for undoped epitaxial layers and the layers are completely disordered at Zn doping concentrations [from dimethyzinc (DMZn) addition to the system] of > 1.7 x 10(18) cm(-3). This is verified by transmission electron diffraction results. As a consequence, the band gap energy increases by 110 meV as the Zn doping level is increased from 3x10(17) to 1.7 x 10(18) cm(-3). The [(1) over bar 10] and [110]-step spacing as well as the root-mean-square roughness are found to be unchanged over the range of doping that produces disordering for both singular (001) and vicinal substrates. This indicates the disordering mechanism induced by Zn does not involve the step edge adatom attachment kinetics as previously reported for Te. The disordering is believed to be caused by the intermixing of Ga and In due to the increase in diffusion coefficient caused by the introduction of Zn. Modulation of the DMZn flow rate during growth has been used to grow heterostructures and quantum wells. No well boundaries were observed by transmission electron microscopy for thin wells, although both ordered and disordered regions are observed in 50 nm "wells." This is believed to result from Zn diffusion between the layers during growth. (C) 1999 American Institute of Physics. [S0021-8979(99)02116-7].
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页码:1982 / 1987
页数:6
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