Influence of internal diffusion barriers on carbon diffusion in pure titanium and Ti-6Al-4V during diamond deposition

被引:60
作者
De Barros, MI
Rats, D
Vandenbulcke, L [1 ]
Farges, G
机构
[1] CNRS, Lab Combust & Syst Reactifs, F-45071 Orleans, France
[2] Ctr Tech Arcueil, DGA, F-94114 Arcueil, France
关键词
diamond; diffusion; diffusion barriers; Ti-6Al-4V; titanium; titanium carbide;
D O I
10.1016/S0925-9635(98)00439-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond coatings were deposited on pure titanium and Ti-6Al-4V, at a temperature in the range of 600-750 degrees C, in a microwave plasma from CH4/H-2 and CO/H-2 mixtures. The influence on carbon diffusion of different intermediate layers, especially tungsten, niobium, titanium nitride and pure titanium previously deposited on titanium alloys by physical vapor deposition (PVD) is reported. These intermediate layers are always composed of at least two sub-layers: (1) an internal diffusion barrier and (2) an external titanium layer that allows some carbon diffusion to be maintained. After diamond deposition, X-ray diffraction (XRD) analysis and scanning electron microscopy (SEM) observations coupled with energy-dispersive X-ray (EDX) analysis of the final multilayer systems allow us to determine the diffracting phases, their lattice parameters and the efficiency of the different barriers. The carbon diffusion coefficients in the titanium carbide phase and in the alpha-titanium solid solution are deduced from an experimental study carried out on pure titanium with or without an underlying diffusion barrier. The results are compared to the carbon diffusion in Ti-6Al-4V alloy. This work permitted us to calculate the carbon concentration profiles in both pure titanium and Ti-6Al-4V substrates. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:1022 / 1032
页数:11
相关论文
共 48 条
[1]  
ADELSBERG LM, 1967, T AIME, V239, P33
[2]   QUANTITATIVE MEASUREMENT OF RESIDUAL BIAXIAL STRESS BY RAMAN-SPECTROSCOPY IN DIAMOND GROWN ON A TI ALLOY BY CHEMICAL-VAPOR-DEPOSITION [J].
AGER, JW ;
DRORY, MD .
PHYSICAL REVIEW B, 1993, 48 (04) :2601-2607
[3]   In-depth structural X-ray investigation of PECVD grown diamond films on titanium alloys [J].
Andreazza, P ;
De Barros, MI ;
Andreazza-Vignolle, C ;
Rats, D ;
Vandenbulcke, L .
THIN SOLID FILMS, 1998, 319 (1-2) :62-66
[4]   GROWTH OF DIAMOND FILMS ON STAINLESS-STEEL [J].
CHEN, H ;
NIELSEN, ML ;
GOLD, CJ ;
DILLON, RO ;
DIGREGORIO, J ;
FURTAK, T .
THIN SOLID FILMS, 1992, 212 (1-2) :169-172
[5]   EFFECT OF THE CHEMICAL NATURE OF TRANSITION-METAL SUBSTRATES ON CHEMICAL-VAPOR-DEPOSITION OF DIAMOND [J].
CHEN, X ;
NARAYAN, J .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (06) :4168-4173
[6]  
Crank J., 1975, MATH DIFFUSION, P75
[7]   DIAMOND COATING OF TITANIUM-ALLOYS [J].
DRORY, MD ;
HUTCHINSON, JW .
SCIENCE, 1994, 263 (5154) :1753-1755
[8]   PREPARATION AND CHARACTERIZATION OF V-N FILMS DEPOSITED BY REACTIVE TRIODE MAGNETRON SPUTTERING [J].
FARGES, G ;
BEAUPREZ, E ;
DEGOUT, D .
SURFACE & COATINGS TECHNOLOGY, 1992, 54 (1-3) :115-120
[9]   DEPOSITION OF CONTINUOUS AND WELL ADHERING DIAMOND FILMS ON STEEL [J].
FAYER, A ;
GLOZMAN, O ;
HOFFMAN, A .
APPLIED PHYSICS LETTERS, 1995, 67 (16) :2299-2301
[10]   Growth stages of chemical vapor deposited diamond on the titanium alloy Ti-6Al-4V [J].
Grogler, T ;
Zeiler, E ;
Dannenfeldt, M ;
Rosiwal, SM ;
Singer, RF .
DIAMOND AND RELATED MATERIALS, 1997, 6 (11) :1658-1667