Surface morphologies in polymers by irradiation with argon ions and consecutive swelling

被引:10
作者
Buescher, Karsten
Berger, Ruediger
Bruenger, Wilhelm
Graf, Karlheinz
机构
[1] Max Planck Inst Polymer Res, D-55128 Mainz, Germany
[2] Fraunhofer Inst Silicon Technol, Itzehoe, Germany
[3] Univ Siegen, Ctr Micro & Nanochem & Engn, Siegen, Germany
关键词
polymer surfaces; nanoripples; microwells; ion projection; plasma; polystyrene;
D O I
10.1016/j.mee.2006.01.007
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Persistent surface morphologies in extruded polymer substrates can be generated in a first step by projecting a mask with argon ions and, secondly, by a consecutive exposure to solvent. In the first step, the polymer is locally cross-linked as a consequence of the interaction of the Ar-ions with -C-H-groups. During the second step, protrusions occur owing to swelling, which persist after removal of the solvent. The morphology of the protrusions can be tuned by choosing the right set of the experimental parameters, i.e. the ion dose, the size and distance of the holes in the mask, and their height by the duration of swelling. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:819 / 822
页数:4
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