Photoelectron elastic scattering effects in XPS

被引：48

作者：

Nefedov, VI ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Gen & Inorgan Chem, Moscow 117907, Russia

来源：

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA | 1999年 / 100卷

关键词：

elastic scattering; quantitative XPS analysis; overlayer thickness determination; in-depth profiling; escape probability of photoelectrons from solids;

D O I：

10.1016/S0368-2048(99)00037-7

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

The photoelectron elastic scattering effects in XPS are reviewed. Using the transport theory approach and Monte-Carlo calculations as well experimental data, the influence of elastic scattering is demonstrated for the escape probability of the photoelectrons from solids, the intensities from hulk and surface systems, the angular intensity dependence including dipole and quadrupole transitions, attenuation lengths from various definitions, mean escape depths, the path-length distribution of photoelectrons in solids, the overlayer thickness determination, in-depth profiling and photoelectron diffractions patterns from single crystals. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：1 / 15

页数：15

共 65 条

[1] PHOTOELECTRON MEAN FREE-PATH CHEMICAL-COMPOSITION DEPENDENCE AND ELASTIC-SCATTERING AND ANALYZER ACCEPTANCE ANGLE FINITENESS EFFECTS IN RESTORING CONCENTRATION PROFILES FROM ANGULAR RESOLVED X-RAY PHOTOELECTRON-SPECTROSCOPY DATA [J].

BASCHENKO, OA .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1991, 57 (3-4) :297-305

[2] DEPTH PROFILING OF ELEMENTS IN SURFACE-LAYERS OF SOLIDS BASED ON ANGULAR RESOLVED X-RAY PHOTOELECTRON-SPECTROSCOPY [J].

BASCHENKO, OA ;

NEFEDOV, VI .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1990, 53 (1-2) :1-18

[3] THE EFFECT OF ELASTIC PHOTOELECTRON SCATTERING ON DEPTH-PROFILING BY ANGULAR RESOLVED X-RAY PHOTOELECTRON-SPECTROSCOPY [J].

BASCHENKO, OA ;

NESMEEV, AE .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1991, 57 (01) :33-46

[4] NEW TECHNIQUE FOR INVESTIGATION OF ANGULAR-DISTRIBUTION OF PHOTOEMISSION FROM SOLIDS - DEMONSTRATION OF THE EFFECT OF ELASTIC-SCATTERING [J].

BASCHENKO, OA ;

MACHAVARIANI, GV ;

NEFEDOV, VI .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1984, 34 (03) :305-308

[5] RELATIVE INTENSITIES IN X-RAY PHOTO-ELECTRON SPECTRA .9. ESTIMATES FOR PHOTO-ELECTRON MEAN FREE PATHS TAKING INTO ACCOUNT ELASTIC COLLISIONS IN A SOLID [J].

BASCHENKO, OA ;

NEFEDOV, VI .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1982, 27 (02) :109-118

[6] RELATIVE INTENSITIES IN X-RAY PHOTOELECTRON-SPECTRA .7. THE EFFECT OF ELASTIC-SCATTERING IN A SOLID ON THE ANGULAR-DISTRIBUTION OF PHOTOELECTRONS ESCAPING FROM SAMPLES COVERED WITH THIN-FILMS OF VARIOUS THICKNESSES [J].

BASCHENKO, OA ;

NEFEDOV, VI .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1980, 21 (02) :153-169

[7] RELATIVE INTENSITIES IN X-RAY PHOTOELECTRON-SPECTRA .4. EFFECT OF ELASTIC-SCATTERING IN A SOLID ON THE FREE-PATH OF ELECTRONS AND THEIR ANGULAR-DISTRIBUTION [J].

BASCHENKO, OA ;

NEFEDOV, VI .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1979, 17 (06) :405-420

[8] ELASTIC AND INELASTIC ELECTRON MEAN FREE PATHS FROM X-RAY PHOTOELECTRON DIFFRACTION EXPERIMENTS [J].

BONZEL, HP ;

BREUER, U ;

KNAUFF, O .

SURFACE SCIENCE, 1990, 237 (1-3) :L398-L404

[9] Angular distribution of photoelectrons emitted from noncrystalline solids [J].

Chen, YF .

PHYSICAL REVIEW B, 1997, 55 (08) :5478-5484

[10] ANGLE-RESOLVED XPS AND AES - DEPTH-RESOLUTION LIMITS AND A GENERAL COMPARISON OF PROPERTIES OF DEPTH-PROFILE RECONSTRUCTION METHODS [J].

CUMPSON, PJ .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1995, 73 (01) :25-52

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