In situ generation of indium catalysts to grow crystalline silicon nanowires at low temperature on ITO

被引:75
作者
Alet, Pierre-Jean [1 ,2 ]
Yu, Linwei [1 ]
Patriarche, Gilles [3 ]
Palacin, Serge [2 ]
Roca i Cabarrocas, Pere [1 ]
机构
[1] Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France
[2] CEA, IRAMIS, SPCSI, Lab Chem Surfaces & Interfaces, F-91191 Gif Sur Yvette, France
[3] CNRS, Lab Photon & Nanostruct, UPR 20, F-91460 Marcoussis, France
关键词
D O I
10.1039/b813046a
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In situ generation of indium catalyst droplets and subsequent growth of crystalline silicon nanowires on ITO by plasma-enhanced CVD are reported, and the wurtzite (Si-IV) phase is clearly evidenced in some wires.
引用
收藏
页码:5187 / 5189
页数:3
相关论文
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