INSITU INVESTIGATION OF THE OPTOELECTRONIC PROPERTIES OF TRANSPARENT CONDUCTING OXIDE AMORPHOUS SILICON INTERFACES

被引：70

作者：

DREVILLON, B ^{[1
]}

KUMAR, S ^{[1
]}

CABARROCAS, PRI ^{[1
]}

SIEFERT, JM ^{[1
]}

机构：

[1] SOLEMS SA,F-91124 PALAISEAU,FRANCE

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 21期

关键词：

D O I：

10.1063/1.101511

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2088 / 2090

页数：3

共 13 条

[1] INFLUENCE OF THE SUBSTRATE ON THE EARLY STAGE OF THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON EVIDENCED BY KINETIC ELLIPSOMETRY
ANTOINE, AM
DREVILLON, B
[J]. JOURNAL OF APPLIED PHYSICS, 1988, 63 (02) : 360 - 367
[2] DEGRADATION OF TIN-DOPED INDIUM-OXIDE FILM IN HYDROGEN AND ARGON PLASMA
BANERJEE, R
RAY, S
BASU, N
BATABYAL, AK
BARUA, AK
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (03) : 912 - 916
[3] BILGER G, 1987, VIDE COUCHES MINCES, V235, P91
[4] FAST POLARIZATION MODULATED ELLIPSOMETER USING A MICROPROCESSOR SYSTEM FOR DIGITAL FOURIER-ANALYSIS
DREVILLON, B
PERRIN, J
MARBOT, R
VIOLET, A
DALBY, JL
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1982, 53 (07) : 969 - 977
[5] FUKUDA N, 1983, J NONCRYST SOLIDS, V59, P525
[6] INCORPORATION OF CONSTITUENT ATOMS OF TRANSPARENT CONDUCTIVE FILMS INTO HYDROGENATED AMORPHOUS-SILICON VIA GAS-PHASE
HIRAO, T
YOSHIOKA, Y
KITAGAWA, M
MIYAUCHI, M
MATSUDA, A
TANAKA, K
WASA, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (08): : L1395 - L1397
[7] INTERACTION OF HYDROGENATED AMORPHOUS-SILICON FILMS WITH TRANSPARENT CONDUCTIVE FILMS
KITAGAWA, M
MORI, K
ISHIHARA, S
OHNO, M
HIRAO, T
YOSHIOKA, Y
KOHIKI, S
[J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (06) : 3269 - 3271
[8] A REAL-TIME ELLIPSOMETRY STUDY OF THE GROWTH OF AMORPHOUS-SILICON ON TRANSPARENT CONDUCTING OXIDES
KUMAR, S
DREVILLON, B
[J]. JOURNAL OF APPLIED PHYSICS, 1989, 65 (08) : 3023 - 3034
[9] EFFECT OF HYDROGEN PLASMA TREATMENT ON TRANSPARENT CONDUCTING OXIDES
MAJOR, S
KUMAR, S
BHATNAGAR, M
CHOPRA, KL
[J]. APPLIED PHYSICS LETTERS, 1986, 49 (07) : 394 - 396
[10] LACK OF CHEMICAL INTERACTION OF HYDROGENATED AMORPHOUS-SILICON WITH INDIUM-DOPED ZINC-OXIDE TRANSPARENT CONDUCTIVE FILMS
ORTIZ, A
SANCHEZ, A
FALCONY, C
FARIAS, MH
HIRATA, GA
COTAARAIZA, L
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1988, 103 (01) : 9 - 13

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