On-Chip Electrical Breakdown of Metallic Nanotubes for Mass Fabrication of Carbon-Nanotube-Based Electronic Devices

被引：7

作者：

Buh, Gyoung-Ho ^{[1
]}

Hwang, Jea-Ho ^{[1
]}

Jeon, Eun-Kyoung ^{[2
]}

So, Hye-Mi ^{[1
]}

Lee, Jeong-O ^{[1
]}

Kong, Ki-jeong ^{[1
]}

Chang, Hyunju ^{[1
]}

机构：

[1] Korea Res Inst Chem Technol, Taejon 305600, South Korea

[2] Chonbuk Natl Univ, Dept Phys, Jeonju 560756, South Korea

来源：

IEEE TRANSACTIONS ON NANOTECHNOLOGY | 2008年 / 7卷 / 05期

关键词：

Carbon nanotube; nano manufacturing; nanotechnology; sensor;

D O I：

10.1109/TNANO.2008.2004624

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A mass fabrication scheme for carbon-nanotube (CNT)-based electronic devices is developed by combining the semiconductor wafer electrical sorting with selective burning of metallic CNT wires. By applying a millisecond electrical pulse to CNTs with the optimized logical scheme of voltage stress, we successfully removed the metallic CNTs but not the high-performance semiconductor CNTs. The fabrication scheme implemented with a probe card achieved a 100% gross yield of CNT-based sensors with a short process time.

引用

页码：624 / 627

页数：4

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