Modeling of amorphous InGaZnO thin-film transistors based on the density of states extracted from the optical response of capacitance-voltage characteristics

被引:89
作者
Jeon, Kichan [1 ]
Kim, Changjung [2 ]
Song, Ihun [2 ]
Park, Jaechul [2 ]
Kim, Sunil [2 ]
Kim, Sangwook [2 ]
Park, Youngsoo [2 ]
Park, Jun-Hyun [1 ]
Lee, Sangwon [1 ]
Kim, Dong Myong [1 ]
Kim, Dae Hwan [1 ]
机构
[1] Kookmin Univ, Sch Elect Engn, Seoul 136702, South Korea
[2] Samsung Adv Inst Technol, Semicond Lab, Yongin 446712, Gyeonggi Do, South Korea
关键词
amorphous semiconductors; electronic density of states; gallium compounds; indium compounds; semiconductor device models; technology CAD (electronics); thin film transistors;
D O I
10.1063/1.3013842
中图分类号
O59 [应用物理学];
学科分类号
摘要
In order to model dc characteristics of n-channel amorphous InGaZnO thin-film transistors from experimentally obtained density of states (DOS), the acceptorlike DOS is extracted from the optical response of capacitance-voltage characteristics and confirmed by the technology computer-aided design (TCAD) simulation comparing with the measured data. Extracted DOS is a linear superposition of two exponential functions (tail and deep states), and its incorporation into TCAD model reproduces well the experimental current-voltage characteristics over the wide range of the gate and drain voltages. The discrepancy at higher gate voltage is expected to be improved by incorporating a gate voltage-dependent mobility in the model.
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页数:3
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