Low-voltage high-mobility pentacene thin-film transistors with polymer/high-k oxide double gate dielectrics

被引:49
作者
Hwang, D. K.
Lee, Kimoon
Kim, Jae Hoon
Im, Seongil [1 ]
Kim, Chang Su
Baik, Hong Koo
Park, Ji Hoon
Kim, Eugene
机构
[1] Yonsei Univ, Inst Phys & Appl Phys, Seoul 120749, South Korea
[2] Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South Korea
[3] Hongik Univ, Dept Informat & Display, Seoul 121791, South Korea
关键词
D O I
10.1063/1.2206555
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the fabrication of pentacene-based thin-film transistors (TFTs) with poly-4-vinylphenol (PVP)/yttrium oxide (YOx) double gate insulator films. The minimum PVP and YOx layer thicknesses were chosen to be 45 and 50 nm, respectively. The PVP and YOx double dielectric layers with the minimum thicknesses exhibited a high dielectric capacitance of 70.8 nF/cm(2) and quite a good dielectric strength of similar to 2 MV/cm at a leakage current level of similar to 10(-6) A/cm(2) while the leakage current from either PVP or YOx alone was too high. Our pentacene TFTs with the 45 nm thin PVP/50 nm thin YOx films operated at -5 V showing a high field effect mobility of 1.74 cm(2)/V s and a decent on/off current ratio of 10(4). Our work demonstrates that the PVP/YOx double layer is a promising gate dielectric to realize low-voltage high-mobility organic TFTs.
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页数:3
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