A study of neon-nitrogen interactions in d.c. glow discharges by optical emission spectroscopy

被引:15
作者
Avelar-Batista, JC [1 ]
Wilson, AD [1 ]
Davison, A [1 ]
Leyland, A [1 ]
Matthews, A [1 ]
Fancey, KS [1 ]
机构
[1] Univ Hull, Dept Engn, Res Ctr Surface Engn, Kingston Upon Hull HU6 7RX, N Humberside, England
关键词
nitrogen; optical emission spectroscopy; penning ionisation;
D O I
10.1016/S0040-6090(01)01438-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Neon-nitrogen d.c. diode glow discharges have been investigated through the use of spatially resolved optical emission spectroscopy. This technique has enabled the discharges to be sampled from inside the cathode sheath and plasma regions. All discharges were operated at -2 kV cathode bias and 6 Pa total pressure. By evaluating spectral line intensity ratios (SLIRs) that incorporate ion species, the principal findings are as follows: first, the cathode current density at low nitrogen partial pressures is boosted by Penning ionisation of nitrogen by neon; evidence of this mechanism is provided by maxima in nitrogen ion-based SLIRs and minima in neon ion-based SLIRs occurring at low nitrogen concentrations. Second, although the optimum nitrogen partial pressure for Penning ionisation appears to be approximately 5%, the maxima in cathode current density and N-2(+)/N-2(0) SLIRs occur at 10-15%; we speculate that a dissociative Penning ionisation mechanism is predominant at 5% but conventional (nondissociative) Penning ionisation, with possible contributions from other mechanisms (such as electron impact ionisation of nitrogen) become significant at 10-15% nitrogen concentration. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:507 / 512
页数:6
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