Critical review: Adhesion in surface micromechanical structures

被引:660
作者
Maboudian, R [1 ]
Howe, RT [1 ]
机构
[1] UNIV CALIF BERKELEY, DEPT CHEM ENGN, BERKELEY, CA 94720 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1997年 / 15卷 / 01期
关键词
D O I
10.1116/1.589247
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present a review on the state of knowledge of surface phenomena behind adhesion in surface micromechanical structures. After introducing the problem of release-related and in-use adhesion, a theoretical framework for understanding the various surface forces that cause strong adhesion of micromechanical structures is presented. Various approaches are described for reducing the work of adhesion. These include surface roughening and chemical modification of polycrystalline silicon surfaces. The constraints that fabrication processes such as release, drying, assembly, and packaging place on surface treatments are described in general. Finally, we briefly outline some of the important scientific and technological issues in adhesion and friction phenomena in micromechanical structures that remain to be clarified. (C) 1997 American Vacuum Society.
引用
收藏
页码:1 / 20
页数:20
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