学术探索
学术期刊
新闻热点
数据分析
智能评审

Microdischarge arrays: A new family of photonic devices

被引：20
作者：
Park, SJ
Chen, J
Wagner, CJ
Ostrom, NP
Liu, C
Eden, JG
机构：
[1] Univ Illinois, Dept Elect & Comp Engn, Lab Opt Phys & Engn, Urbana, IL 61801 USA
[2] Univ Illinois, Dept Elect & Comp Engn, Microelect Lab, Urbana, IL 61801 USA
来源：
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 2002年 / 8卷 / 01期
关键词：
discharges; displays; optical device integration; optoelectronic devices;
D O I：
10.1109/2944.991409
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The optical and electrical characteristics of microdischarge devices and arrays fabricated in semiconductors and metal/polymer structures are described. Devices as small as (10 mum)(2) in emitting area (nanoliters in volume) and arrays as large as 30 x 30 have been demonstrated and operated at gas pressures up to and exceeding one atmosphere. This new generation of microoptical sources is capable of producing photons from the infrared to the vacuum ultraviolet and beyond and is well suited for integration with microoptoelectronic, fluidic, and mechanical systems.
引用
收藏
页码：139 / 147
页数：9
相关论文
共 14 条
[1]  
BITZER DL, 1966, AFIPS C P, V29, P541
[2]   Microdischarge array-assisted ignition of a high-pressure discharge: Application to arc lamps [J].
Eden, JG ;
Wagner, CJ ;
Gao, J ;
Ostrom, NP ;
Park, SJ .
APPLIED PHYSICS LETTERS, 2001, 79 (26) :4304-4306
[3]   Continuous-wave emission in the ultraviolet from diatomic excimers in a microdischarge [J].
Frame, JW ;
John, PC ;
De Temple, TA ;
Eden, JG .
APPLIED PHYSICS LETTERS, 1998, 72 (21) :2634-2636
[4]   Planar microdischarge arrays [J].
Frame, JW ;
Eden, JG .
ELECTRONICS LETTERS, 1998, 34 (15) :1529-1531
[5]   Microdischarge devices fabricated in silicon [J].
Frame, JW ;
Wheeler, DJ ;
DeTemple, TA ;
Eden, JG .
APPLIED PHYSICS LETTERS, 1997, 71 (09) :1165-1167
[6]   Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems [J].
Mogensen, KB ;
Friis, P ;
Hübner, J ;
Petersen, N ;
Jorgensen, AM ;
Telleman, P ;
Kutter, JP .
OPTICS LETTERS, 2001, 26 (10) :716-718
[7]   Flexible microdischarge arrays: Metal/polymer devices [J].
Park, SJ ;
Wagner, CJ ;
Herring, CM ;
Eden, JG .
APPLIED PHYSICS LETTERS, 2000, 77 (02) :199-201
[8]   Performance of microdischarge devices and arrays with screen electrodes [J].
Park, SJ ;
Wagner, CJ ;
Eden, JG .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2001, 13 (01) :61-63
[9]   Arrays of microdischarge devices having 50-100μm square pyramidal Si anodes and screen cathodes [J].
Park, SJ ;
Chen, J ;
Liu, C ;
Eden, JG .
ELECTRONICS LETTERS, 2001, 37 (03) :171-172
[10]   Silicon microdischarge devices having inverted pyramidal cathodes: Fabrication and performance of arrays [J].
Park, SJ ;
Chen, J ;
Liu, C ;
Eden, JG .
APPLIED PHYSICS LETTERS, 2001, 78 (04) :419-421
12