A near-field scanned microwave probe for spatially localized electrical metrology

被引：38

作者：

Talanov, VV ^{[1
]}

Scherz, A ^{[1
]}

Moreland, RL ^{[1
]}

Schwartz, AR ^{[1
]}

机构：

[1] Neocera Inc, Beltsville, MD 20705 USA

来源：

APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 13期

关键词：

D O I：

10.1063/1.2189147

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have developed a near-field scanned microwave probe with a sampling volume of approximately 10 mu m in diameter, which is the smallest one achieved in near-field microwave microscopy. This volume is defined to confine > 99% of the probe's net sampling reactive energy, thus making the response virtually independent of the sample properties outside of this region. The probe is formed by a 4 GHz balanced stripline resonator tapered down to a few-micrometer tip size and provides noncontact, noninvasive measurement capability. It is uniquely suited for spatially localized electrical metrology applications, such as evaluation of Cu/low-k interconnects on semiconductor production wafers. (c) 2006 American Institute of Physics.

引用

页数：3

共 18 条

[1]

Anlage S. M., 2006, Scanning Probe Microscopy: Electrical and Electromechanical Phenomena at the Nanoscale

[2] COMBINED SHEAR FORCE AND NEAR-FIELD SCANNING OPTICAL MICROSCOPY [J].