High-quality m-plane GaN thin films deposited on γ-LiAlO2 by ion-beam-assisted molecular-beam epitaxy -: art. no. 011902

被引:39
作者
Gerlach, JW
Hofmann, A
Höche, T
Frost, F
Rauschenbach, B
Benndorf, G
机构
[1] Leibniz Inst Oberflachenmodifizierung eV, D-04318 Leipzig, Germany
[2] Univ Leipzig, Inst Expt Phys 2, D-04103 Leipzig, Germany
关键词
D O I
10.1063/1.2159100
中图分类号
O59 [应用物理学];
学科分类号
摘要
GaN(1 (1) over bar 00) thin films are deposited on gamma-LiAlO2(100) by low-energy-ion-beam-assisted molecular-beam epitaxy. Structural properties of the epitaxial GaN films are investigated by x-ray diffraction, transmission electron microscopy, and atomic force microscopy. X-ray diffraction measurements give evidence for a high crystalline quality far better than previously reported in literature. Cross-section transmission electron microscopy and atomic force microscopy show an anisotropy in defect structure and surface topography parallel and perpendicular to the GaN c axis. Optical properties are examined by photoluminescence spectroscopy at various temperatures. The spectra exhibit a strong and sharp near-band-gap transition, as well as a donor-acceptor pair transition. (c) 2006 American Institute of Physics.
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页数:3
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