Correction of nonlinearity in one-frequency optical interferometry

被引:105
作者
Wu, CM [1 ]
Su, CS [1 ]
Peng, GS [1 ]
机构
[1] NATL TSING HUA UNIV, INST NUCL SCI, HSINCHU, TAIWAN
关键词
D O I
10.1088/0957-0233/7/4/009
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The nonlinearity of one-frequency optical interferometry with quadrature fringe detection is the result of a number of factors including polarization mixing, unequal gain of detectors, imbalanced beams and lack of quadrature. An elliptical least-squares fitting technique to correct the nonlinearity is presented in this paper. Experimental results demonstrate that a nonlinearity-free condition can be achieved and the stability of the interferometer set-up in our laboratory is better than +/-0.7 nm over 2.5 h.
引用
收藏
页码:520 / 524
页数:5
相关论文
共 10 条
[1]   AN ANALYSIS OF POLARIZATION MIXING ERRORS IN DISTANCE MEASURING INTERFEROMETERS [J].
AUGUSTYN, W ;
DAVIS, P .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06) :2032-2036
[2]   OPTICAL FRINGE SUBDIVISION WITH NANOMETRIC ACCURACY [J].
BIRCH, KP .
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1990, 12 (04) :195-198
[3]   RECENT ADVANCES IN DISPLACEMENT MEASURING INTERFEROMETRY [J].
BOBROFF, N .
MEASUREMENT SCIENCE AND TECHNOLOGY, 1993, 4 (09) :907-926
[4]   PHASE STEP MEASUREMENT AND VARIABLE STEP ALGORITHMS IN PHASE-SHIFTING INTERFEROMETRY [J].
FARRELL, CT ;
PLAYER, MA .
MEASUREMENT SCIENCE AND TECHNOLOGY, 1992, 3 (10) :953-958
[5]   ACCURATE POLARIZATION INTERFEROMETER [J].
Greco, V ;
MOLESINI, G ;
QUERCIOLI, F .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (07) :3729-3734
[6]   DETERMINATION AND CORRECTION OF QUADRATURE FRINGE MEASUREMENT ERRORS IN INTERFEROMETERS [J].
HEYDEMANN, PLM .
APPLIED OPTICS, 1981, 20 (19) :3382-3384
[7]   INVESTIGATION AND COMPENSATION OF THE NONLINEARITY OF HETERODYNE INTERFEROMETERS [J].
HOU, WM ;
WILKENING, G .
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1992, 14 (02) :91-98
[8]  
PENG GS, 1992, THESIS OREG STATE, P77
[9]  
RATHJEN C, 1995, OPT SOC AM A, V12, P1997
[10]  
WU CM, 1996, IN PRESS MEAS SCI TE