0.15dB/cm loss in Unibond SOI waveguides

被引：23

作者：

Ang, TW ^{[1
]}

Reed, GT

Vonsovici, A

Evans, AGR

Routley, PR

Josey, MR

机构：

[1] Univ Surrey, Sch Elect Engn Informat Technol & Math, Guildford GU2 5XH, Surrey, England

[2] Univ Southampton, Dept Elect & Comp Sci, Southampton SO17 1BJ, Hants, England

来源：

ELECTRONICS LETTERS | 1999年 / 35卷 / 12期

关键词：

D O I：

10.1049/el:19990689

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The optical loss of Unibond waveguides is measured and reponed for the first time, using grating couplers. Ar a wavelength of 1.31 mu m, a loss of 0.15 +/- 0.05 dB/cm is obtained for TE polarisation. This allows good quality low loss integrated optical circuits to be fabricated at low cost.

引用

页码：977 / 978

页数：2

共 8 条

[1]

Ang TW, 1999, P SOC PHOTO-OPT INS, V3620, P79, DOI 10.1117/12.343717

[2]

ANG TW, 1999, P PREP 99 UMIST MANC, P108

[3]

AubertonHerve AJ, 1997, IEICE T ELECTRON, VE80C, P358

[4] SILICON-ON-INSULATOR MATERIAL TECHNOLOGY [J].

BRUEL, M .

ELECTRONICS LETTERS, 1995, 31 (14) :1201-1202

[5]

FISCHER U, 1996, IEEE PHOTONIC TECH L, V8, P633

[6] Detailed characterization of Unibond material [J].

Munteanu, D ;

Maleville, C ;

Cristoloveanu, S ;

Moriceau, H ;

Aspar, B ;

Raynaud, C ;

Faynot, O ;

Pelloie, JL ;

AubertonHerve, AJ .

MICROELECTRONIC ENGINEERING, 1997, 36 (1-4) :395-398

[7] SILICON ON INSULATOR OPTICAL WAVE-GUIDES FORMED BY DIRECT WAFER BONDING [J].

REED, GT ;

LI, JH ;

TANG, CK ;

LIN, CL ;

HEMMENT, PLF ;

RICKMAN, AG .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1992, 15 (02) :156-159

[8] LOW-LOSS PLANAR OPTICAL WAVE-GUIDES FABRICATED IN SIMOX MATERIAL [J].

RICKMAN, A ;

REED, GT ;

WEISS, BL ;

NAMAVAR, F .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1992, 4 (06) :633-635

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