Influence of crystal structure on the light scatter of zirconium oxide films

被引：11

作者：

Reicher, D ^{[1
]}

Jungling, K ^{[1
]}

机构：

[1] UNIV NEW MEXICO,CTR HIGH TECHNOL MAT,ALBUQUERQUE,NM 87131

来源：

APPLIED OPTICS | 1997年 / 36卷 / 07期

关键词：

light scatter; thin films; zirconium dioxide;

D O I：

10.1364/AO.36.001626

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The relationship of Light scatter by a thin film to thin-film morphology is examined. Light scatter by reactively evaporated ZrO2 thin films is analyzed by using in situ total internal reflection microscopy and angle-resolved scatterometry. Film crystal structure is analyzed by transmission electron microscopy and x-ray diffraction. Relations between film crystal structure and film scatter are established by using this information. Surface topography is analyzed by the use of scanning force microscopy. Results of a spectrophotometric determination of the film refractive index are reported. The film scatter is found to be sensitive to the crystal phase of the film, which is a function of substrate deposition temperature. A simple method of separating bulk from surface scatter is described. (C) 1997 Optical Society of America.

引用

页码：1626 / 1637

页数：12

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