Photoemission and ab initio theoretical study of interface and film formation during epitaxial growth and annealing of praseodymium oxide on Si(001)

被引：94

作者：

Fissel, A ^{[1
]}

Dabrowski, J ^{[1
]}

Osten, HJ ^{[1
]}

机构：

[1] IHP, D-15236 Frankfurt, Germany

来源：

JOURNAL OF APPLIED PHYSICS | 2002年 / 91卷 / 11期

关键词：

D O I：

10.1063/1.1471943

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

X-ray photoelectron spectroscopy (XPS) was performed to study the formation process of Pr2O3/Si(001) interfaces and films during epitaxial growth and postgrowth annealing. A significant shift in the Pr and O core-level binding energy was found accompanied by an analogous shift in the Pr2O3 valence band maximum. This shift depends on the oxide layer thickness and interface structure, as indicated by ab initio pseudopotential calculations. It is caused by interface dipoles in the Si/Pr2O3 interface region due to the accumulation of oxygen. Besides providing a insight into the growth mechanism and interface properties of high-K dielectrics on Si, our results also demonstrate the usefulness of in vacuo XPS for investigating epitaxial growth processes. (C) 2002 American Institute of Physics.

引用

页码：8986 / 8991

页数：6

共 39 条

[31] Nitrogen incorporation at Si(001)-SiO2 interfaces:: Relation between N 1s core-level shifts and microscopic structure [J].