Micro-stereolithography of polymeric and ceramic microstructures

被引：365

作者：

Zhang, X ^{[1
]}

Jiang, XN ^{[1
]}

Sun, C ^{[1
]}

机构：

[1] Penn State Univ, Dept Ind & Mfg Engn, University Pk, PA 16802 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 77卷 / 02期

关键词：

stereolithography; MEMS; micromachining; microfabrication; polymer; ceramics;

D O I：

10.1016/S0924-4247(99)00189-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Micro-stereolithography (mu SL) is a novel micro-manufacturing process which builds the truly 3D microstructures by solidifying the liquid monomer in a layer by layer fashion. In this work, an advanced mu SL apparatus is designed and developed which includes an Ar+ laser, the beam delivery system, computer-controlled precision x-y-z stages and CAD design tool, and in situ process monitoring systems. The 1.2 mu m resolution of mu SL fabrication has been achieved with this apparatus. The microtubes with high aspect ratio of 16 and real 3D microchannels and microcones are fabricated on silicon substrate. For the first time, mu SL of ceramic microgears has been successfully demonstrated. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：149 / 156

页数：8

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