Theoretical studies on nitrogen-oxygen complexes in silicon

被引:28
作者
Gali, A [1 ]
Miro, J [1 ]
Deak, P [1 ]
Ewels, CP [1 ]
Jones, R [1 ]
机构
[1] UNIV EXETER,DEPT PHYS,EXETER EX4 4QL,DEVON,ENGLAND
关键词
D O I
10.1088/0953-8984/8/41/016
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Semi-empirical PM3 cluster calculations are used to show that stable, electrically active NO complexes may exist in silicon. Based on their relative stability with respect to oxygen and nitrogen pairs, the retardation of thermal double donor formation in the presence of nitrogen is explained, but an equilibrium concentration much less than that of NN pairs is predicted. It is also shown that interaction of NO with a single nitrogen atom creates a bistable NNO defect, while encounter with an oxygen or an NN pair preserves the electrical activity of the NO centre. The possible role of the NO complex in shallow thermal donor formation is discussed.
引用
收藏
页码:7711 / 7722
页数:12
相关论文
共 47 条
[31]   THERMAL DONORS IN SILICON - AN INVESTIGATION OF THEIR STRUCTURE WITH ELECTRON-NUCLEAR DOUBLE-RESONANCE [J].
MEILWES, N ;
SPAETH, JM ;
GOTZ, W ;
PENSL, G .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1994, 9 (09) :1623-1632
[32]   NEW OXYGEN RELATED SHALLOW THERMAL DONOR CENTERS IN CZOCHRALSKI-GROWN SILICON [J].
NAVARRO, H ;
GRIFFIN, J ;
WEBER, J ;
GENZEL, L .
SOLID STATE COMMUNICATIONS, 1986, 58 (03) :151-155
[33]   OXYGEN COMPLEXES IN SILICON [J].
NEEDELS, M ;
JOANNOPOULOS, JD ;
BARYAM, Y ;
PANTELIDES, ST .
PHYSICAL REVIEW B, 1991, 43 (05) :4208-4215
[34]   THE EVIDENCE FOR INTERACTION OF THE N-N PAIR WITH OXYGEN IN CZOCHRALSKI SILICON [J].
QI, MW ;
TAN, SS ;
ZHU, B ;
CAI, PX ;
GU, WF ;
XU, XM ;
SHI, TS ;
QUE, DL ;
LI, LB .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (06) :3775-3777
[35]   THE EFFECT OF THE STM TIP ON SI(100) RECONSTRUCTED SURFACES [J].
RAMOS, MMD ;
STONEHAM, AM ;
SUTTON, AP .
JOURNAL OF PHYSICS-CONDENSED MATTER, 1993, 5 (18) :2849-2858
[36]  
RASMUSSEN FB, 1994, MATER SCI FORUM, V143-, P1221, DOI 10.4028/www.scientific.net/MSF.143-147.1221
[37]  
RASMUSSEN FB, 1995, COMMUNICATION
[38]  
SEWART JJP, 1991, J COMPUT CHEM, V12, P320
[39]  
SNYDER LC, 1988, MATER RES SOC S P, V104, P179
[40]  
SNYDER LC, 1989, COMMUNICATION