Effects of Al contents on microstructures of Cr1-XAlXN and Zr1-XAlXN films synthesized by cathodic arc method

Cr1-xAlxN and Zr1-xAlxN (0 <= x <= 1.0) films were synthesized by the cathodic arc method using alloy and metal targets. The X-ray diffraction patterns showed that the Cr1-xAlxN changed from cubic structure at X=0.6 to hexagonal structure at X=0.7. The peaks of Zr1-xAlxN showed the NaCl structure at X=0.37 and changed to wurtzite structure at X=0.50. The lattice parameter of Cr1-xAlxN films changed from 0.416 nm (X=0) to 0.413 nm (X=1.0), and that of Zr1-xAlxN changed from 0.458 nm (X=0) to 0.444 nm (X=0.37). The maximum microhardness of Cr1-xAlxN and Zr1-xAlxN films was 27 GPa (X=0.6) and 29 GPa (X=0.37), respectively. Changes in microstructures-related transition from the cubic to hexagonal were studied, and corresponding hardness changes were discussed in Cr1-xAlxN and Zr1-xAlxN. (c) 2004 Elsevier B.V. All rights reserved.